Tier-1 semiconductor equipment OEM
LLK Tester — automated test equipment for load-lock modules
- Problem
- Field issues on load-lock (LLK) units called for automated functional testing of every unit before shipment, at the manufacturer and at the supplier, with one GUI for configuration, execution and reporting.
- Solution
- A Beckhoff PLC / EtherCAT test station in a 19-inch rack, with operator, diagnostic and admin modes, part-number-mapped test suites, and JSON/PDF/XLSX reports — delivered through PDR, CDR and FDR with a nine-document qualification package.
- 100%CAT test cases passed, no issues raised
- ±0.05°PAL repeatability spec
- 26°tilt stability verified